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Thermo Fisher Scientific Versa 3D DualBeam

Large chamber DualBeam (FIB-SEM) instrument allowing Focused Ion Beam milling and Scanning Electron Microscopy. The SEM utilizes a Shottkey thermal field emitter (FEG) with accelerating voltages from 200V to 30kV.

5 axis motorised stage

High throughput ion column optics with a high-current ion column applying an Galium liquid-metal ion source.

Platinum Gas Injection System

Low vacuum ESEM (environmental SEM) is possible.

Detectors include;

  • Everhart-Thornley SE detector (ETD).
  • Ion Conversion and Electron (ICE) detector for secondary ions (SI) and electrons (SE).
  • Retractable Directional Backscatter (DBS)*

Fitted with Quorum PP3010 cryo-SEM preparation system for imaging samples under cryo conditions, Stage cooled to -190°C with cold trap. Preparation chamber vacuum down to 1x10-6mbar and has tools for freeze fracturing, sublimation and sputter coating.

This versatile FIB-SEM instrument consists of a scanning electron microscope, applying an electron beam for imaging. In addition, the microscope is equipped with a second column producing a gallium ion beam. This allows to cut or ablate samples to ion beam mill material, microfabricate or produce cryo-lamellas for later observation or tomographic acquisition in a TEM.

The attached Quorum cold stage and preparation system allows imaging and FIB preparation of cryo-frozen material for optimal biological sample preservation without the need of chemical fixatives or dehydration.

FEI Versa 3D Dualbeam Specifications

Electron Source

Schottky thermal field emitter (FEG). 12 Month lifetime of the electron source

Accelerating Voltage

200 V to 30 kV

Ion column

High-current Gallium liquid metal ion source. Source Lifetime 1300 hr/2,600uA

Ion probe current

0.6 pA to 65 nA


5 axes motorized. -15° to 90° tilt. Maximum sample size, 150 mm, 500g

30kV SE Resolution

1.2 nm

Ion beam resolution

7 nm at 30kV

Angle between electron

and ion beam columns


Specimen Exchange

Pump down time (high vacuum), approx. 210 seconds

Operating Temperature

Room temperature; approx. 21ºC ; cryo stage to -190ºC with cryo-shield

Gas Injection System (GIS)


SEM Imaging

Pixel scan size up to 6144 x 4096 pixels; 25 ns to 25 ms pixel dwell time