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Thermo Fisher Scientific Versa 3D DualBeam
Configuration
Large chamber DualBeam (FIB-SEM) instrument allowing Focused Ion Beam milling and Scanning Electron Microscopy. The SEM utilizes a Shottkey thermal field emitter (FEG) with accelerating voltages from 200V to 30kV.
5 axis motorised stage
High throughput ion column optics with a high-current ion column applying an Galium liquid-metal ion source.
Platinum Gas Injection System
Low vacuum ESEM (environmental SEM) is possible.
Detectors include;
- Everhart-Thornley SE detector (ETD).
- Ion Conversion and Electron (ICE) detector for secondary ions (SI) and electrons (SE).
- Retractable Directional Backscatter (DBS)*
Fitted with Quorum PP3010 cryo-SEM preparation system for imaging samples under cryo conditions, Stage cooled to -190°C with cold trap. Preparation chamber vacuum down to 1x10-6mbar and has tools for freeze fracturing, sublimation and sputter coating.
Application
This versatile FIB-SEM instrument consists of a scanning electron microscope, applying an electron beam for imaging. In addition, the microscope is equipped with a second column producing a gallium ion beam. This allows to cut or ablate samples to ion beam mill material, microfabricate or produce cryo-lamellas for later observation or tomographic acquisition in a TEM.
The attached Quorum cold stage and preparation system allows imaging and FIB preparation of cryo-frozen material for optimal biological sample preservation without the need of chemical fixatives or dehydration.
FEI Versa 3D Dualbeam Specifications
Electron Source | Schottky thermal field emitter (FEG). 12 Month lifetime of the electron source |
Accelerating Voltage | 200 V to 30 kV |
Ion column | High-current Gallium liquid metal ion source. Source Lifetime 1300 hr/2,600uA |
Ion probe current | 0.6 pA to 65 nA |
Stage | 5 axes motorized. -15° to 90° tilt. Maximum sample size, 150 mm, 500g |
30kV SE Resolution | 1.2 nm |
Ion beam resolution | 7 nm at 30kV |
Angle between electron and ion beam columns | 52° |
Specimen Exchange | Pump down time (high vacuum), approx. 210 seconds |
Operating Temperature | Room temperature; approx. 21ºC ; cryo stage to -190ºC with cryo-shield |
Gas Injection System (GIS) | Platinum |
SEM Imaging | Pixel scan size up to 6144 x 4096 pixels; 25 ns to 25 ms pixel dwell time |