Configuration
Large chamber DualBeam (FIB-SEM) instrument allowing Focused Ion Beam milling and Scanning Electron Microscopy. The SEM utilizes a Shottkey thermal field emitter (FEG) with accelerating voltages from 200V to 30kV.

5 axis motorised stage

High throughput ion column optics with a high-current ion column applying an Galium liquid-metal ion source.

Platinum Gas Injection System

Low vacuum ESEM (environmental SEM) is possible.

Detectors include;

• Everhart-Thornley SE detector (ETD).
• Ion Conversion and Electron (ICE) detector for secondary ions (SI) and electrons (SE).
• Retractable Directional Backscatter (DBS)*

Fitted with Quorum PP3010 cryo-SEM preparation system for imaging samples under cryo conditions, Stage cooled to -190°C with cold trap. Preparation chamber vacuum down to 1x10-6mbar and has tools for freeze fracturing, sublimation and sputter coating.

Application
This versatile FIB-SEM instrument consists of a scanning electron microscope, applying an electron beam for imaging. In addition, the microscope is equipped with a second column producing a gallium ion beam. This allows to cut or ablate samples to ion beam mill material, microfabricate or produce cryo-lamellas for later observation or tomographic acquisition in a TEM.

The attached Quorum cold stage and preparation system allows imaging and FIB preparation of cryo-frozen material for optimal biological sample preservation without the need of chemical fixatives or dehydration.

FEI Versa 3D Dualbeam Specifications